The road map to advanced semiconductor nodes calls for ultralow-k dielectrics to reduce parasitic capacitance between adjacent metal lines, especially on interconnection layers, at the 32-nanometer ...

The search for low-k material to put between the interconnect lines on an IC has led us from oxides of silicon to strange low-k materials, to even stranger porous materials. The obvious end-point of ...

The deleterious effect of the dead layer on the static response of the device can be understood from the induced potentials shown in Fig. 1b. First we kept the atoms fixed to their zero-field ...

Capacitive sensors are found in a wide range of equipment, from consumer electronics to industrial/process control. Touch buttons are increasingly found in lamps and dimmers. Motion detectors can ...